EDS

Technical features:
- ZEISS EVO MA 15 – scanning electron microscope for high vacuum and variable pressure range.
- Computer-controlled SEM with tungsten cathode
- Three-lens electron optics OptiBeam-ray control
- Variable pressure range between 10Pa – 400Pa
- Easy VP pressure adjustment from HV to VP without changing the pressure reducing screens
- Gas inlet: air

Specified location resolution (secondary electrons):
3.0nm at 30kV (ETSE)
3.4nm at 30kV (VPSE)
4.0nm at 30kV in BSD
8.0nm bei 3kV in High vacuum
Acceleration voltage: 0.2V-30 kV
Special current: 0.5pA – 5µA

Software:
- SmartPI particle analysis with a Bruker XFlash6-10
- Detector: 10mm² with a resolution of 129 eV
- Software Bruker: Quantax Basic
- SmartSEM

Benefits:
- Fully automated material analysis of the particles (see example report according to ISO16232)
- Recording of up to five filters simultaneously
- Specific recipes for particle analysis
- Single analysis of relevant particles
- Fast data recovery

Example report: